Cz直拉单晶石墨热场
graphite thermal field for CZ single crystal
直拉单晶炉内使用的石墨部件是一类易耗件,它由各种高纯。等静压石墨加工而成。例如其中的石墨坩埚及其他石墨部件采用了高纯细颗粒结构石墨;石墨加热器采用了高纯各向同性石墨;石墨保温罩和石墨盖板采用高纯中颗粒结构的石墨。
Graphite parts which are used in Cz silicon crystal growing furnace are consumable parts. They are made of a variety of high-purity, isostatic graphite. For example,graphite crucible and other parts use graphite with high purity and fine grain. Graphite heater is made of high-purity, isostatic graphite. Graphite thermal insulation cover and cover board are made of high purity,medium grain graphite.
具体产品有:保温筒,加热器,三瓣坩埚,坩埚托盘,导流筒,石墨电极,电极螺母,切硅棒用石墨垫,隔热屏,舟皿等。
Products: thermal insulation barrel, heater, three-segment crucible,crucible tray, draft tube, graphite electrode, electrode nut, graphite pad for cutting silicon rods, heat shield, graphite boat, etc.
该用途对石墨的要求 The requirements on graphite
1、高纯度 1、High purity
2、细颗粒,匀质的材料结构 2、Fine grain, uniform material structure
3、机械强度高 3、High mechanical strength
4、耐温度剧变 4、Thermal shock resistance
5、合适的材料电阻 5、Suitable resistance
6、耐腐蚀性 6、Corrosion resistance
7、优良的保温特性 7、Excellent thermal insulation